Testing Charges: D4.04, Thin Film Devices Group (w.e.f.01.04.2019)
Testing Charges: D4.04, Thin Film Devices Group (w.e.f.01.04.2019)
Sl. No. Name of the instrument Sample / Item Name Test Parameters Sample Requirements,if any Testing Charges per Sample Rs
1 SPECTROSCOPICELLIPSOMETER Thin Film (deposited on flat substrate) Refractive index (n), extinction coefficient (k)and film (200-1700 nm wavelengths) Substrate size 10 - 150 mm. Film thickness 20 nm to few microns.
Films of dielectrics, semiconductors, polymers and metals can be measured.
Homogeneous films will yield more reliable values of the optical constants
and thickness. The optical constants for highly absorbing films may not be
very reliable.
15250
2 STYLUS
PROFILER
Thin
Film (deposited on flat substrate)
Film
Thickness, (50 nm to 5 microns )
Max.
substrate diameter 150 mm. Film must have sharp step, should not be too soft.
12500
3 FIBER OPTIC BASED MINI SPECTROPHOTOMETER Thin Film (deposited on Glass / Silicon Substrate) Transmission, Reflectance, Absorbance, Refractive index (n) and
Extinction coefficient (k) over 400-1000 nm wavelength, and thickness.
Transparent / weakly absorbing homogeneous thin films only,
thickness 100-5000 nm, deposited on transparent substrate (e.g. glass) or
preferably on reflecting substrate (e.g. polished silicon wafer)
10500

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